MEMS Applications
MEMS, which has been called a key component that supports the smart and digital transformation (DX) through IoT, is incorporated into sensors that detect acceleration, pressure, temperature, and other parameters, and into the microphones and speakers of smartphones to improve the performance and convenience of devices and to make them smaller and lighter.
Recently, devices used in a wide range of fields, such as robotics, medicine, and agriculture, are also being replaced by MEMS products, expanding MEMS applications into areas that could not be realized with conventional sensors and actuators.
These articles present application examples of MEMS-based sensors and actuators.