This product is a calorimetric sensor that makes use of MEMS technology.
It is equipped with a high resolution Σ⊿AD converter and outputs a highly precise flow-rate value as a digital value.
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Flow rate Sensor
This product is a flow sensor using MEMS technology. The product mounts a ⊿Σ AD converter with a resolution of 24 bits and outputs a high-accuracy flow rate value as a digital value.
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Differential Pressure Sensor
This product is a small differential pressure sensor using MEMS technology. Thermal flow MEMS can be highaccuracy measurement with low preesure level.
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Air velocity Sensor
This product is a flow velocity sensor using MEMS technology. The product mounts a ⊿Σ AD converter with a resolution of 16bits and outputs a high-accuracy flow velocity value as a digital value.
